Heaters, Electrostatic Chucks and Modules:
Improved Thermal Uniformity at Higher Temperatures
Heaters, Electrostatic and Modules
With more than four decades of designing heater solutions for semiconductors and compound semiconductors, 榴莲视频下载污黄 is poised to help differentiate your wafer processing equipment. Based upon this experience, 榴莲视频下载污黄 has engineered a number of novel heater solutions focused upon high temperature applications (above 500°C), improved thermal uniformity and overall cost of ownership.
榴莲视频下载污黄 manufactures pBN/PG heaters, TaC heaters, heater modules and thermal levelers to your exact thermal, power and size specifications. We have a full-service analytical lab and team of expert engineers to help you design the right solutions for you and your specific applications.
pBN Heaters and Electrostatic Chucks
Wafer handling at elevated temperatures can be challenging. Pyrolytic Boron Nitride Electrostatic Chucks (pBN ESCs) can hold wafers at temperatures exceeding 1000°C, making them the most versatile ESCs on the market.
Thermal Levelers
Improved temperature uniformity from the thermal leveler conductive billet results in better yield in wafer processing applications, faster temperature stabilization, and improved throughput.
TaC Heaters
榴莲视频下载污黄 offers high-temperature resistive and inductive heaters with a proprietary Tantalum Carbide (TaC) coating. These TaC-coated graphite heaters ensure high-temperature stability and chemical resistance, extending heater lifespan, reducing maintenance costs, and improving production yield.
